发明名称 Semiconductor device and method for producing the same
摘要 A semiconductor device of an embodiment includes a p-type SiC layer; a SiC region provided on the p-type SiC layer and containing H (hydrogen) or D (deuterium) in an amount of 1×1018 cm−3 or more and 1×1022 cm−3 or less; and a metal layer provided on the SiC region.
申请公布号 US9601581(B2) 申请公布日期 2017.03.21
申请号 US201514641775 申请日期 2015.03.09
申请人 Kabushiki Kaisha Toshiba 发明人 Shimizu Tatsuo;Shinohe Takashi
分类号 H01L29/16;H01L21/265;H01L21/283;H01L21/04;H01L21/30;H01L21/324;H01L29/45;H01L29/78;H01L29/66;H01L29/06;H01L29/10 主分类号 H01L29/16
代理机构 Oblon, McClelland, Maier & Neustadt, L.L.P. 代理人 Oblon, McClelland, Maier & Neustadt, L.L.P.
主权项 1. A semiconductor device comprising: a p-type SiC layer; a first SiC region provided directly on the p-type SiC layer, the first SiC region containing H (hydrogen) or D (deuterium) in an amount of 1×1018 cm−3 or more and 1×1022 cm or less; and a metal layer provided directly on the first SiC region.
地址 Minato-ku JP