发明名称 |
Semiconductor device and method for producing the same |
摘要 |
A semiconductor device of an embodiment includes a p-type SiC layer; a SiC region provided on the p-type SiC layer and containing H (hydrogen) or D (deuterium) in an amount of 1×1018 cm−3 or more and 1×1022 cm−3 or less; and a metal layer provided on the SiC region. |
申请公布号 |
US9601581(B2) |
申请公布日期 |
2017.03.21 |
申请号 |
US201514641775 |
申请日期 |
2015.03.09 |
申请人 |
Kabushiki Kaisha Toshiba |
发明人 |
Shimizu Tatsuo;Shinohe Takashi |
分类号 |
H01L29/16;H01L21/265;H01L21/283;H01L21/04;H01L21/30;H01L21/324;H01L29/45;H01L29/78;H01L29/66;H01L29/06;H01L29/10 |
主分类号 |
H01L29/16 |
代理机构 |
Oblon, McClelland, Maier & Neustadt, L.L.P. |
代理人 |
Oblon, McClelland, Maier & Neustadt, L.L.P. |
主权项 |
1. A semiconductor device comprising:
a p-type SiC layer; a first SiC region provided directly on the p-type SiC layer, the first SiC region containing H (hydrogen) or D (deuterium) in an amount of 1×1018 cm−3 or more and 1×1022 cm or less; and a metal layer provided directly on the first SiC region. |
地址 |
Minato-ku JP |