Gas processing apparatus

摘要

A gas processing apparatus includes a process chamber for installing a process target therein, a through-hole being air-tightly in communication with a gas supply pipe, an injector for supplying gas into the process chamber, a sleeve being engaged to an outer peripheral surface of the injector inside the through-hole, an annular sealing member engaged to the outer peripheral surface of the injector, an engagement surface facing the sealing member, and a pressing part for pressing the sleeve toward the outer side of the process chamber. The pressing part compresses the sealing member by exerting pressure to the engagement surface from an end surface of the sleeve toward the sealing member, so that an inside of the injector and an outside of the injector are air-tightly sealed.

主权项

1. A gas processing apparatus for performing a process by supplying gas to a process target, the gas processing apparatus comprising:
an air-tight process chamber including a wall part and configured to install the process target therein; a through-hole that is formed in the wall part and is air-tightly in communication with a gas supply pipe provided at an outer side of the process chamber; an injector that is inserted to the through-hole from an inner side of the process chamber and configured to supply the gas into the process chamber from the gas supply pipe; a sleeve engaged to an outer peripheral surface of the injector inside the through-hole; an annular sealing member engaged to the outer peripheral surface of the injector and provided inside the through-hole in a position more toward the outer side of the process chamber than the sleeve; an engagement surface that faces the sealing member and is formed in an annular shape along a wall surface of the through-hole in a position more toward the outer side of the process chamber than the sealing member; and a pressing part that is provided inside the process chamber and configured to press the sleeve toward the outer side of the process chamber; wherein the pressing part is configured to compress the sealing member by exerting pressure to the engagement surface from an end surface of the sleeve toward the sealing member, so that an inside of the injector and an outside of the injector are air-tightly sealed.