Diamond-like carbon film-formed material and method for producing the same

摘要

In a DLC film-formed material, an intermediate layer is disposed between a substrate and a DLC film. The intermediate layer is a composite layer containing a component metal atom derived from the substrate and a diamond-like carbon. For example, such intermediate layer can be formed by applying a negative bias to the substrate while reducing the absolute value of the negative bias with time, in a plasma layer formation process. A carbon target or a hydrocarbon gas can be used as a carbon source.

主权项

1. A diamond-like carbon film-formed material, comprising a substrate and a diamond-like carbon film with an intermediate layer therebetween,
wherein: the intermediate layer is a composite layer comprising a component metal atom derived from the substrate and carbon, and is deposited on the surface of the substrate, with the diamond-like carbon film deposited on the surface of the intermediate layer; a composition ratio of the component metal atom in the intermediate layer decreases continuously in a direction from the substrate to the diamond-like carbon film, such that the composition ratio of the component metal atom in the intermediate layer does not increase in the direction from the substrate to the diamond-like carbon film; and the intermediate layer is a single layer.