发明名称 Diffractometry-based analysis method and associated diffractometer, particularly suitable for samples comprising multiple layers of materials
摘要 A method and device that analyzes a sample with a diffractometer that includes a collimated source, a spectrometric detector, and a detection collimator. The sample is irradiated with an incident beam and the detector has a detection plane with multiple physical or virtual pixels. An measured energy spectrum is established for each pixel and each measured energy spectrum is readjusted. The spectrum is expressed as a function of a variable that accounts for the energy of the scattered radiation and an angle of diffraction. The fulfillment of at least one multiple material criterion is verified. Groups of pixels are formed using the results of the verification step, each group corresponding to a layer of material and different groups corresponding to different layers of material, and the spectra are combined by group, during which, for each group, the readjusted spectra for the pixels of the group are combined.
申请公布号 US9599580(B2) 申请公布日期 2017.03.21
申请号 US201314428721 申请日期 2013.09.19
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES;MOZIDO, INC. 发明人 Ghammraoui Bahaa;Paulus Caroline;Tabary Joachim
分类号 G01T1/36;G01N23/20 主分类号 G01T1/36
代理机构 Brinks Gilson & Lione 代理人 Brinks Gilson & Lione
主权项 1. A method of analyzing a sample of materials by diffractometry, the method comprising: providing a diffractometer that comprises a source configured to emit an incident beam having a central axis X, and a detector comprising, a detector material, which, on a near side to the sample of materials, presents a detection plane, spectrometry measurement means, configured to measure an energy released by each photon interaction with the detector material and to establish at least one measured spectrum; a detection collimator, associated with the detector, the detector and the detection collimator being arranged so as to have a detection axis D forming a diffraction angle θ with the central axis X of the incident beam; irradiating the sample with the incident beam, wherein the detector comprises a pixelated detector comprising means for locating an interaction of a photon with the detector material (30), so as to define a partition of the detector in physical or virtual pixels (Pi), and associating one of the physical or virtual pixels with each photon interaction; establishing an energy spectrum for each physical or virtual pixel of the detector; adjusting each measured energy spectrum (E), by expressing the energy spectrum according to a variable that accounts for an energy of scattered radiation and the diffraction angle θi, to obtain an adjusted spectra, for each measured energy spectrum; verifying fulfillment of at least one multimaterial criterion representing the presence of several layers of materials; forming groups of pixels using results of the verifying step, each group corresponding to a layer of material, where different groups correspond to different layers of material; and combining spectra by group for each group, where the adjusted spectrum obtained for the pixels (Pi) of the group are combined.
地址 Paris FR