Method of fabricating a polishing

摘要

Polishing pads with apertures are described. Methods of fabricating polishing pads with apertures are also described.

主权项

1. A method of fabricating a polishing pad for polishing a substrate, the method comprising:
mixing a set of polymerizable materials to form a mixture in a base of a formation mold; moving a lid of the formation mold into the mixture, the lid having disposed thereon a pattern of protrusions and an aperture protrusion with a height greater than the pattern of protrusions; and, with the lid placed in the mixture, at least partially curing the mixture to form a molded homogeneous polishing body comprising a back surface and a polishing surface having disposed therein a pattern of grooves and an opening defining an aperture region.