Low overdrive probes with high overdrive substrate

摘要

A method for testing a semiconductor device is disclosed. The method comprises positioning a probe card comprising a plurality of probes above the semiconductor device and moving the probe card in a vertical direction towards the semiconductor device. The plurality of probes are moving in a vertical direction towards a plurality of electrical structures of the semiconductor device until each probe of the plurality of probes has made mechanical contact with a corresponding electrical structure of the plurality of electrical structures with a minimum quantity of force. The each probe of the plurality of probes absorbs a portion of vertical overdrive after contacting their corresponding electrical structures. The probe card absorbs any remaining vertical overdrive. The vertical overdrive is a continuing vertical movement of the plurality of probes after a first probe of the plurality of probes mechanically contacts a first corresponding electrical structure.

主权项

1. A method for testing a semiconductor device, the method comprising:
positioning a probe card comprising a plurality of probes above the semiconductor device; and moving the probe card in a vertical direction towards the semiconductor device, wherein the moving comprises moving in a vertical direction towards a plurality of electrical structures of the semiconductor device until each probe of the plurality of probes has made mechanical contact with a corresponding electrical structure of the plurality of electrical structures with a prescribed quantity of force, wherein each probe of the plurality of probes absorbs a portion of vertical overdrive after contacting its corresponding electrical structure, and wherein the probe card absorbs any remaining vertical overdrive, and wherein vertical overdrive is a continuing vertical movement of the plurality of probes after a first probe of the plurality of probes mechanically contacts a first corresponding electrical structure.