Magnetic chuck and method for producing a magnetic chuck

摘要

The invention is directed to a magnetic chuck and a method for producing a magnetic chuck. The magnetic chuck comprises an upper base made of a single piece of magnetic-conductive material and having a top surface, sidewalls extending orthogonally from the top surface, a cavity formed within the upper base with an open end opposite to the top surface and an opposite closed end directed toward the top surface. A plurality of cores extends orthogonally from the top surface and into the cavity, wherein a plurality of permanent magnets is arranged in the cavity. A reversible magnet is arranged between each of the cores and a lower base; and an excitation coil is arranged around the circumference of each reversible magnet. A portion of the cavity between the permanent magnets and the closed end of the cavity is filled with non-magnetic-conductive material.

主权项

1. A magnetic chuck, comprising:
an upper base made of a single piece of magnetic-conductive material and having a top surface, sidewalls extending orthogonally from the top surface, a cavity formed within the upper base with an open end opposite to the top surface and an opposite closed end directed toward the top surface, and a plurality of cores extending orthogonally from the top surface and into the cavity; a lower base; a plurality of permanent magnets arranged within the cavity; a reversible magnet arranged between each of the cores and the lower base; and an excitation coil arranged around the circumference of each reversible magnet; wherein a portion of the cavity between the permanent magnets and the closed end of the cavity is filled with a non-magnetic-conductive material and the portion of the cavity between the permanent magnets and the closed end of the cavity has an extension in a direction parallel to the top surface that is smaller than the extension of the permanent magnets in the same direction.