Pressure-less ozonated DI-water (DIO₃) recirculation reclaim system

摘要

The invention provides, in one aspect, a system for recirculating ozonated liquid. The system includes a contactor including at least two inlets and at least two outlets. The contactor is in fluid communication with a first liquid source at a first contactor inlet and a second liquid source at a second contactor inlet, and the second contactor inlet receives gas that purges at least a portion of gas from liquid received at the first contactor inlet. The purged gas exits the contactor at a first contactor outlet. The contactor is in fluid communication with the second liquid source at a second contactor outlet, and the contactor drains at least a portion of the liquid in the contactor, the drained liquid exiting the contactor at the second contactor outlet. The contactor includes a third inlet in fluid communication with the first liquid source, the third inlet allowing the first liquid source to release liquid at an ambient pressure.

主权项

1. A method for recirculating ozonated liquid, comprising:
supplying to a contactor (i) at an ambient pressure the ozonated liquid from a tool and (ii) a gas; purging, by the contactor, with the gas, at least a portion of gas from the ozonated liquid to generate a purged gas and a purged ozonated liquid; converting the purged gas into a different gas; draining a portion of the purged ozonated liquid from the contactor; and supplying at least a portion of the drained ozonated liquid from the contactor to a fluid delivery system connected to the tool.