发明名称 METHOD FOR A NON-AQUEOUS ELECTROLESS POLYOL DEPOSITION OF METAL OR METAL ALLOY IN FEATURES OF A SUBSTRATE
摘要 A method for depositing metal or metal alloy on a substrate includes preparing a mixture including a hydroxide, a polyol solvent, a metal precursor and a complexing agent, wherein the mixture does not include water; applying the mixture to a substrate including exposed metal surfaces to selectively deposit metal onto the exposed metal surfaces of the substrate; and heating the mixture to a predetermined deposition temperature range from 120° C. and 160° C. at least one of before or after applying the mixture to the substrate.
申请公布号 US2017073815(A1) 申请公布日期 2017.03.16
申请号 US201514850199 申请日期 2015.09.10
申请人 Lam Research Corporation 发明人 Patel Mehul N.;Hymes Diane;Dordi Yezdi;Joi Aniruddha
分类号 C23C18/16;B05D1/00;C23C18/40 主分类号 C23C18/16
代理机构 代理人
主权项 1. A method for depositing metal or metal alloy on a substrate, comprising: preparing a mixture including a hydroxide, a polyol solvent, a metal precursor and a complexing agent, wherein the mixture does not include water; applying the mixture to a substrate including exposed metal surfaces to selectively deposit metal onto the exposed metal surfaces of the substrate; and heating the mixture to a predetermined deposition temperature range from 120° C. and 160° C. at least one of before or after applying the mixture to the substrate.
地址 Fremont CA US