发明名称 |
METHOD FOR A NON-AQUEOUS ELECTROLESS POLYOL DEPOSITION OF METAL OR METAL ALLOY IN FEATURES OF A SUBSTRATE |
摘要 |
A method for depositing metal or metal alloy on a substrate includes preparing a mixture including a hydroxide, a polyol solvent, a metal precursor and a complexing agent, wherein the mixture does not include water; applying the mixture to a substrate including exposed metal surfaces to selectively deposit metal onto the exposed metal surfaces of the substrate; and heating the mixture to a predetermined deposition temperature range from 120° C. and 160° C. at least one of before or after applying the mixture to the substrate. |
申请公布号 |
US2017073815(A1) |
申请公布日期 |
2017.03.16 |
申请号 |
US201514850199 |
申请日期 |
2015.09.10 |
申请人 |
Lam Research Corporation |
发明人 |
Patel Mehul N.;Hymes Diane;Dordi Yezdi;Joi Aniruddha |
分类号 |
C23C18/16;B05D1/00;C23C18/40 |
主分类号 |
C23C18/16 |
代理机构 |
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代理人 |
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主权项 |
1. A method for depositing metal or metal alloy on a substrate, comprising:
preparing a mixture including a hydroxide, a polyol solvent, a metal precursor and a complexing agent, wherein the mixture does not include water; applying the mixture to a substrate including exposed metal surfaces to selectively deposit metal onto the exposed metal surfaces of the substrate; and heating the mixture to a predetermined deposition temperature range from 120° C. and 160° C. at least one of before or after applying the mixture to the substrate. |
地址 |
Fremont CA US |