METHOD AND SYSTEM FOR MODIFYING A SURFACE TOPOGRAPHY

摘要

According to one example, there is provided a method or system for modifying the surface topography of a substrate support.

主权项

1. A printing system for modifying a surface topography of a substrate support for fluid communication with a vacuum pump, the printing system comprising:
an imaging module to determine an initial surface topography of the substrate support comprising an arrangement of vacuum orifices; a controller to:
obtain a desired surface topography of the substrate support; andgenerate an image based on the initial surface topography and the desired surface topography; and a printing module to print the generated image on the substrate support to modify the topography of at least some of the vacuum orifices.