发明名称 METHOD FOR TEXTURING POLYIMIDE SURFACES
摘要 The invention relates to a method for texturing the surface of polyimide films by means of oxygen plasma treatment, characterized in that the product of the multiplication of the power (in W) applied to generate the oxygen plasma with the treatment duration (in min) satisfies the following equation: power (W) x time (min) ≈ 800-2000 (W.min); provided that the power value is greater than 50 W and not greater than 500 W.
申请公布号 WO2017041126(A1) 申请公布日期 2017.03.16
申请号 WO2016AT60053 申请日期 2016.09.08
申请人 TECHNISCHE UNIVERSITÄT WIEN 发明人 BEDNAR, Nikola;ADAMOVIC, Nadja
分类号 H01L31/0236;H01L31/0392;H05K3/38 主分类号 H01L31/0236
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