APPARATUS AND METHOD FOR ELECTROSTATIC SPRAYING OR ELECTROSTATIC COATING OF A THIN FILM

摘要

Provided is a resist film forming device which uses an electrostatic spray device which is capable of forming a thin film with a uniform thickness on a workpiece. A resist film forming device (100), which forms a resist film (108) on a substrate by electrostatic spraying, comprises: a nozzle (102) which, upon application of a prescribed voltage, sprays liquid particles which form the raw material for a resist film (108) toward a substrate (105) having stepped portions (105a); a driving means (111) for causing relative movement of the substrate (105) or the nozzle (102); and a control means (110) for controlling such that the resist film (108) is formed on the substrate (105) having the stepped portions (105a) by the liquid particles.

主权项

1. An insulating film forming method for forming an insulating film on a work by electrostatic spraying or electrostatic coating, comprising:
applying a prescribed voltage to a nozzle; spraying or applying particles of a liquid agent as ingredients of the insulating film from the nozzle toward or to the work; and forming the insulating film on the work using the particles of the liquid agent.