PROBE

摘要

A probe includes a transmission line support substrate, a probe tip and a probe tip support substrate. The transmission line support substrate supports a transmission line through which a terahertz wave is transmitted. The probe tip transmits the terahertz wave, and is contact with an object to be measured. The probe tip support substrate supports the probe tip. The probe tip support substrate is detachable from the transmission line support substrate.

主权项

1. A probe comprising:
a transmission line support substrate that supports a transmission line through which a terahertz wave is transmitted; a probe tip that transmits the terahertz wave, and is contact with an object to be measured; and a probe tip support substrate that supports the probe tip, wherein the probe tip support substrate is detachable from the transmission line support substrate.