SEMICONDUCTOR MEMORY DEVICE

摘要

According to one embodiment, a semiconductor memory device includes a substrate, a stacked body, a plurality of columnar portions, and a first interconnect. When an imaginary first straight line extending in a second direction crossing a first direction is set, the plurality of columnar portions are divided into first sets of n (n is an integer number not less than 3 and not more than 32) columnar portions with center axes alternately disposed on both sides of the first straight line along the second direction and second sets of n columnar portions having position relationships of inversion of the first sets with respect to the first straight line, and the first sets and the second sets are alternately arranged.

主权项

1. A semiconductor memory device comprising:
a substrate; a stacked body provided on the substrate and including a plurality of electrode layers respectively separately stacked; a plurality of columnar portions provided within the stacked body and extending in a stacking direction of the stacked body; and a first interconnect provided on the plurality of columnar portions and extending in a first direction, wherein when an imaginary first straight line extending in a second direction crossing both the first direction and a direction perpendicular to the first direction is set, the plurality of columnar portions being divided into:
first sets of n (n is an integer number not less than 3 and not more than 32) columnar portions disposed adjacently along the first straight line having center axes alternately disposed on both sides of the first straight line along the second direction, andsecond sets of n columnar portions disposed adjacently along an imaginary second straight line parallel to the first straight line having center axes alternately disposed on both sides of the second straight line along the second direction, the second sets having position relationships of inversion with respect to the first sets, and the first sets and the second sets being alternately arranged with respect to one another.