发明名称 Social Network Service for Semiconductor Manufacturing Equipment and Users
摘要 Methods and systems for sharing information related to operational metrics of a plurality of equipment used in manufacturing of semiconductor wafer includes interfacing a server with the equipment to allow the server to receive a plurality of parameters including operational metrics associated with operation of each of the plurality of equipment. The plurality of parameters are processed to identify event-related data, message-related data and to generate human-readable interpretation for the identified event-related data and the message related data. Users are identified for receiving the operational metrics of each of the plurality of equipment. The event-related data, message-related data and the corresponding human-readable interpretation for the operational metrics associated with each of the equipment are forwarded to a social network service for performing a posting operation to social data streams associated with the identified users. The operational metrics received over time from each of the equipment are managed so as to provide timely updates to the respective users on the status of each equipment. The timely updates are provided as additional postings to the respective social data streams of the users.
申请公布号 US2017078238(A1) 申请公布日期 2017.03.16
申请号 US201514851873 申请日期 2015.09.11
申请人 Lam Research Corporation 发明人 Huang Chung Ho;Chan Henry T.;Weetman Chad R.;Hemker David J.
分类号 H04L12/58;H01L21/67;H04L29/06;G01M99/00 主分类号 H04L12/58
代理机构 代理人
主权项 1. A system, comprising: a server that is configured to be interconnected with a plurality of equipment used for manufacturing semiconductor wafers, the server includes, an interface to communicatively connect each of the plurality of equipment with the server, the interface configured to allow receiving, at the server, a plurality of parameters that are associated with operation of each of the plurality of equipment, wherein the plurality of parameters include operational metrics generated at the equipment during processing of the semiconductor wafers; an interpreter module executing on the server configured to receive, process the plurality of parameters, the interpreter module includes, a semantic identifier logic to examine at least a portion of the plurality of parameters of a specific equipment to identify event-related data, message-related data contained within and to identify a human-readable interpretation for the event-related data, message-related data identified in the portion; a message assembly logic to assemble the human-readable interpretation, message-related data, event-related data for the specific equipment into post data; and a social network service coupled to the interpreter module, the coupling allows the interpreter module to forward the post data to the social network service, the social network service is configured to perform a posting operation of the human-readable interpretation to social data streams associated with one or more users that are authorized to receive information related to the operational metrics of the specific equipment.
地址 Fremont CA US