发明名称 METHOD AND APPARATUS FOR MANUFACTURING SINGLE CRYSTAL
摘要 Disclosed herein is a method for manufacturing a single crystal, the method includes: photographing an image of a boundary portion between the single crystal and a melt by a camera during a single crystal pull-up process according to a Czochralski method; comparing at least one pixel included in a left side region with respect to an extension line of a pull-up shaft of the single crystal and at least one pixel included in a right side region with respect to the extension line; and determining an abnormality in a luminance distribution of the image from a result of the comparing.
申请公布号 US2017076437(A1) 申请公布日期 2017.03.16
申请号 US201615247032 申请日期 2016.08.25
申请人 SUMCO CORPORATION 发明人 HAMADA Ken
分类号 G06T7/00 主分类号 G06T7/00
代理机构 代理人
主权项 1. A method for manufacturing a single crystal comprising: photographing an image of a boundary portion between the single crystal and a melt by a camera during a single crystal pull-up process according to a Czochralski method; comparing at least one pixel included in a left side region with respect to an extension line of a pull-up shaft of the single crystal and at least one pixel included in a right side region with respect to the extension line; and determining an abnormality in a luminance distribution of the image from a result of the comparing.
地址 Tokyo JP