发明名称 |
COMPOUND, RESIN, MATERIAL FOR FORMING UNDERLAYER FILM FOR LITHOGRAPHY, UNDERLAYER FILM FOR LITHOGRAPHY, PATTERN FORMING METHOD, AND METHOD FOR PURIFYING THE COMPOUND OR RESIN |
摘要 |
The compound according to the present invention is represented by a specific formula. The compound according to the present invention has a structure according to the specific formula, and therefore can be applied to a wet process and is excellent in heat resistance and etching resistance. In addition, the compound according to the present invention has such a specific structure, and therefore has a high heat resistance, a relatively high carbon concentration, a relatively low oxygen concentration and also a high solvent solubility. Therefore, the compound according to the present invention can be used to form an underlayer film whose degradation is suppressed at high-temperature baking and which is also excellent in etching resistance to oxygen plasma etching or the like. Furthermore, the compound is also excellent in adhesiveness with a resist layer and therefore can form an excellent resist pattern. |
申请公布号 |
US2017073288(A1) |
申请公布日期 |
2017.03.16 |
申请号 |
US201515125503 |
申请日期 |
2015.03.13 |
申请人 |
Mitsubishi Gas Chemical Company, Inc. |
发明人 |
MAKINOSHIMA Takashi;ECHIGO Masatoshi |
分类号 |
C07C39/15;G03F7/11;G03F7/32;C07C37/68;G03F7/16;G03F7/20;C08G8/10;C09D161/12 |
主分类号 |
C07C39/15 |
代理机构 |
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代理人 |
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主权项 |
1. A compound represented by the following formula (1): wherein R1 is a 2n-valent group having 1 to 30 carbon atoms, each of R2 to R5 is independently a linear, branched or cyclic alkyl group having 1 to 10 carbon atoms, an aryl group having 6 to 10 carbon atoms, an alkenyl group having 2 to 10 carbon atoms, a thiol group or a hydroxyl group, wherein at least one R4 and/or at least one R5 is a hydroxyl group and/or a thiol group, each of m2 and m3 is independently an integer of 0 to 8, each of m4 and m5 is independently an integer of 0 to 9, wherein at least one of m4 and m5 is an integer of 1 to 9, n is an integer of 1 to 4, and each of p2 to p5 is independently an integer of 0 to 2. |
地址 |
Tokyo JP |