MULTI CHARGED PARTICLE BEAM WRITING METHOD, AND MULTI CHARGED PARTICLE BEAM WRITING APPARATUS

摘要

A multi charged particle beam writing method includes assigning, for each unit irradiation region per beam of multi-beams, each divided shot obtained by dividing a shot of a maximum irradiation time and continuously irradiate the same unit irradiation region, to at least one of a plurality of beams that can be switched by collective deflection; calculating, for each unit irradiation region, an irradiation time; determining, for each unit irradiation region, whether to make each divided shot be beam “on” or “off” so that the total irradiation time for a plurality of corresponding divided shots to be beam “on” may become a combination equivalent to the irradiation time calculated; and applying, to the corresponding unit irradiation region, the plurality of corresponding divided shots to be beam “on”, using the plurality of beams while switching a beam between beams by collective deflection.

主权项

1. A multi charged particle beam writing method comprising:
assigning, for each unit irradiation region of unit irradiation regions of a target object, per beam of multi-beams, each divided shot of a plurality of divided shots, which are obtained by dividing a shot of a maximum irradiation time and continuously irradiate a same unit irradiation region in the unit irradiation regions, to at least one of a plurality of beams that can be switched by collective deflection of the multi-beams; calculating, for the each unit irradiation region, an irradiation time of a beam irradiating a corresponding unit irradiation region in the unit irradiation regions; determining, for the each unit irradiation region, whether to make the each divided shot of the plurality of divided shots beam “on” or beam “off” so that a total irradiation time for a plurality of corresponding divided shots to be beam “on” in the plurality of divided shots becomes a combination equivalent to the irradiation time calculated; and applying, to the corresponding unit irradiation region in the unit irradiation regions, the plurality of corresponding divided shots to be beam “on” in the plurality of divided shots continuously irradiating the same unit irradiation region, using the plurality of beams while switching a beam for the plurality of corresponding divided shots between the plurality of beams by collective deflection of the multi-beams.