BACKSIDE COUPLED SYMMETRIC VARACTOR STRUCTURE

摘要

A symmetric varactor structure may include a first varactor component. The first varactor component may include a gate operating as a second plate, a gate oxide layer operating as a dielectric layer and a body operating as a first plate of an area modulating capacitor. In addition, doped regions may surround the body of the first varactor component. The first varactor component may be supported on a backside by an isolation layer. The symmetric varactor structure may also include a second varactor component electrically coupled to the backside of the first varactor component through a backside conductive layer.

主权项

1. A method of fabricating a symmetric varactor structure, comprising:
fabricating a first varactor component adjacent to a second varactor component of the symmetric varactor structure on an isolation layer; thinning the symmetric varactor structure to expose a body of the first varactor component and a body of the second varactor component; and depositing and patterning a conductive layer to couple the body of the first varactor component and the body of the second varactor component.