发明名称 COPPER PASTE FOR JOINING, METHOD FOR MANUFACTURING JOINED BODY, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要 This copper paste for joining includes metal particles and a dispersant. The metal particles include sub- copper microparticles having a volume average particle diameter of 0.12-0.8 μm inclusive and flake-shaped copper microparticles having a maximum diameter of 1-20 μm inclusive and an aspect ratio of 4 or higher. The amount of copper microparticles included in the metal particles and having a maximum diameter of 1-20 μm inclusive and an aspect ratio of less than 2 is 50% by mass or less expressed in terms of the total amount of the flake-shaped copper microparticles.
申请公布号 WO2017043541(A1) 申请公布日期 2017.03.16
申请号 WO2016JP76333 申请日期 2016.09.07
申请人 HITACHI CHEMICAL COMPANY, LTD. 发明人 ISHIKAWA Dai;KAWANA Yuki;SUGAMA Chie;NAKAKO Hideo;EJIRI Yoshinori;KURAFUCHI Kazuhiko
分类号 B22F7/08;B22F1/00;C04B37/02;H01B1/00;H01B1/22;H01L21/52 主分类号 B22F7/08
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