GRAPHENE WIRING STRUCTURE AND METHOD FOR MANUFACTURING GRAPHENE WIRING STRUCTURE

摘要

A graphene wiring structure of an embodiment has a substrate, a metal part on the substrate, multilayered graphene connected to the metal part, a first insulative film on the substrate, and a second insulative film on the substrate. The metal part is present between the first insulative film and the second insulative film. Edges of the multilayered graphene are connected to the metal part. A side face of the first insulative film vertical to the substrate opposes a side face of the second insulative film vertical to the substrate. A first outer face of the multilayered graphene is in physical contact with a first side face of the first insulative film vertical to the substrate. A second outer face of the multilayered graphene is in physical contact with a second side face of the second insulative film vertical to the substrate.

主权项

1. A graphene wiring structure comprising:
a substrate: a metal part on the substrate: multilayered graphene connected to the metal part; a first insulative film on the substrate; and a second insulative film on the substrate, wherein the metal part is present between the first insulative film and the second insulative film, edges of the multilayered graphene are connected to the metal part, a side face of the first insulative film vertical to the substrate opposes a side face of the second insulative film vertical to the substrate, a first outer face of the multilayered graphene is in physical contact with a first side face of the first insulative film vertical to the substrate, and a second outer face of the multilayered graphene is in physical contact with a second side face of the second insulative film vertical to the substrate.