| 发明名称 |
PLANETARY WAFER CARRIERS |
| 摘要 |
A wafer carrier for a plurality of wafers, the wafer carrier having a platen with a plurality of openings and a plurality of wafer retention platforms, the platen configured to rotate about a first axis, the plurality of wafer retention platforms configured to rotate about respective second axes, each of the wafer retention platforms rotatably coupled to one of the plurality of openings by friction reducing bearings, the platen and the plurality of wafer retention platforms and the friction reducing bearings all being constructed of the same material. |
| 申请公布号 |
US2017076972(A1) |
申请公布日期 |
2017.03.16 |
| 申请号 |
US201615266308 |
申请日期 |
2016.09.15 |
| 申请人 |
Veeco Instruments Inc. |
发明人 |
Krishnan Sandeep;Urban Lukas;Gurary Alexander;Moy Keng;Paranjpe Ajit |
| 分类号 |
H01L21/687 |
主分类号 |
H01L21/687 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A wafer carrier for a plurality of wafers, the wafer carrier comprising:
a platen with a plurality of openings, the platen configured to rotate about a first axis; a plurality of wafer retention platforms, each of the plurality of wafer retention platforms rotatably coupled to one of the plurality of openings by a friction reducing bearing assembly and configured to rotate about a respective second axis; wherein the platen, the plurality of wafer retention platforms and the friction reducing bearing assemblies are constructed of the same material. |
| 地址 |
Plainview NY US |
