| 主权项 |
1. A reflective mask, comprising:
a substrate; a first stacked body provided on a surface of the substrate, the first stacked body including a plurality of first layers and a plurality of second layers arranged alternately in a first direction, the first direction being perpendicular to the surface, a refractive index for a first electromagnetic ray of the first layer being different from a refractive index for the first electromagnetic ray of the second layer; a second stacked body provided on the surface and arranged with the first stacked body in a second direction, the second direction intersecting the first direction, the second stacked body including a plurality of third layers and a plurality of fourth layers arranged alternately in the first direction, a refractive index for the first electromagnetic ray of the third layer being different from a refractive index for the first electromagnetic ray of the fourth layer; and an intermediate portion provided in at least one portion between the first stacked body and the second stacked body, a reflectance to the first electromagnetic ray of the first stacked body being higher than a reflectance to the first electromagnetic ray of the intermediate portion, a reflectance to the first electromagnetic ray of the second stacked body being higher than the reflectance to the first electromagnetic ray of the intermediate portion. |
