| 摘要 |
An interferometric microscopy arrangement for inspecting a sample includes a first illumination source providing a collimated first light beam, a second illumination source providing a second light beam focused onto the sample, a selection filter, an interferometric unit and an optical detector system. The selection filter directs the first and the second light beam towards the sample. The first and the second light beams after sample interaction are received by the interferometric unit. The interferometric unit generates from the first light beam a first object beam and a first reference beam, filters out object information from the first reference beam. The interferometric unit directs the first object beam, the first reference beam, and the second light beam towards the optical detector system. The optical detector assembly detects an interference pattern formed from the first light beam and also detects an optical pattern formed from the second light beam. |
