MICROMECHANICAL SOLID-STATE ELECTROLYTE SENSOR ELEMENT AND METHOD FOR PRODUCING SAME

摘要

The invention relates to a micromechanical solid-state electrolyte sensor element (110) for detecting a component of a gas or to a fuel cell assembly (110) and to a method for producing same. The micromechanical solid-state electrolyte sensor element (110) or the fuel cell assembly (110) comprises the following: − first electrodes (158) and second electrodes (160); − at least one solid-state electrolyte membrane (152) which is arranged at least partly between the first electrodes (158) and the second electrodes (160); and − at least one micromechanical support structure (156) which has at least one insulating material (130), said micromechanical support structure (156) being designed to mechanically stabilize the solid-state electrolyte membrane (152); wherein at least one continuous conductive layer (138) is embedded into the insulating material (130) of the micromechanical support structure (156), and the conductive layer (138) is designed in particular to heat the solid-state electrolyte membrane (152).