ACIDIC ETCHING WASTE SOLUTION REUSE AND RECOVERY SYSTEM HAVING TAIL-GAS TREATMENT FUNCTION

摘要

An acidic etching waste solution reuse and recovery system having a tail-gas treatment function comprises: an etching solution treatment system; and a chlorine gas recycling system. The etching solution treatment system comprises: an etching production line (1); a mother liquor storage tank (2); an electrolytic cell; and a dissolution and absorption system (6). The electrolytic cell comprises a cathode compartment (3) and an anode compartment (5). The mother liquor storage tank (2), the cathode compartment (3), the anode compartment (5) and the dissolution and absorption system (6) sequentially communicate with each other. The etching production line (1) respectively communicates with the mother liquor storage tank (2) and the dissolution and absorption system (6). The chlorine gas recycling system comprises a gas-scrubbing system (7) and a tail-gas treatment system (8). The anode compartment (5), the gas-scrubbing system (7) and the tail-gas treatment system (8) sequentially communicate with each other. The acidic etching waste solution reuse and recovery system is configured to treat an acidic etching waste solution, and can perform an off-line production operation, save costs and resources, and prevent environmental pollution.