发明名称 SEMICONDUCTOR DEVICE
摘要 According to one embodiment, a semiconductor device includes a substrate; a first structure; a second structure; a step; an insulating layer; a first pillar; a second pillar; a first contact portion; and a second contact. The first structure includes a first electrode layer and a first insulator. The first structure has a first terrace on a surface of the first insulator. The second structure includes a second electrode layer and a second insulator. The second structure has a second terrace on a surface of the second insulator. The second contact portion is electrically connected to the second electrode layer via the second terrace. The first contact portion is located between the step and the first pillar. The step is located between the first contact portion and the second pillar.
申请公布号 US2017077133(A1) 申请公布日期 2017.03.16
申请号 US201615070785 申请日期 2016.03.15
申请人 Kabushiki Kaisha Toshiba 发明人 SONEHARA Takeshi;KITO Masaru
分类号 H01L27/115 主分类号 H01L27/115
代理机构 代理人
主权项 1. A semiconductor device comprising: a substrate; a first structure provided on the substrate, the first structure including a first electrode layer and a first insulator, the first structure having a first terrace on a surface of the first insulator; a second structure provided on the first structure except a part on the first terrace, the second structure including a second electrode layer and a second insulator, the second structure having a second terrace on a surface of the second insulator; a step provided between the first terrace and the second terrace; an insulating layer provided on the first terrace and the second terrace; a first pillar provided in the insulating layer and the first structure, the first pillar reaching the substrate via the first terrace; a second pillar provided in the insulating layer, the second structure, and the first structure, the second pillar reaching the substrate via the second terrace, the second pillar being adjacent to the first pillar via the step; a first contact portion provided in the insulating layer and the first insulator, the first contact portion electrically connected to the first electrode layer via the first terrace; and a second contact portion provided in the insulating layer and the second insulator, the second contact portion electrically connected to the second electrode layer via the second terrace, the first contact portion located between the step and the first pillar, and the step located between the first contact portion and the second pillar.
地址 Minato-ku JP