Plasma Module With Slotted Ground Plate

摘要

A plasma source assembly for use with a processing chamber includes a blocker plate with at least one elongate slot through the blocker plate. The elongate slots can be have different lengths and angles relative to sides of the blocker plate.

主权项

1. A plasma source assembly comprising:
a housing; a blocker plate in electrical communication with the housing, the blocker plate having an inner peripheral edge, an outer peripheral edge, a first side and a second side defining a field, an elongate slot is within the field and extends through the blocker plate, the elongate slot having a length and a width; and an RF hot electrode within the housing, the RF hot electrode having a front face and a back face, an inner peripheral end and an outer peripheral end, the front face of the RF hot electrode spaced from the blocker plate to define a gap.