PHYSICAL QUANTITY SENSOR, ELECTRONIC APPARATUS, AND MOVING OBJECT

摘要

A physical quantity sensor according to the invention includes a first movable electrode portion having a portion that is opposed to a first fixed electrode portion, and a second movable electrode portion having a portion that is opposed to a second fixed electrode portion. The physical quantity sensor further includes a movable mass portion that has a shape surrounding a first fixed electrode side fixing portion and a second fixed electrode side fixing portion in a plan view, and a first movable electrode side fixing portion and a second movable electrode side fixing portion that support the movable mass portion via a first elastic portion and a second elastic portion and are disposed at the outside of the movable mass portion in a plan view.

主权项

1. A physical quantity sensor comprising:
a first fixed electrode side fixing portion including a first fixed electrode portion; a second fixed electrode side fixing portion including a second fixed electrode portion; a movable mass portion that includes a first movable electrode portion having a portion which is opposed to the first fixed electrode portion and a second movable electrode portion having a portion which is opposed to the second fixed electrode portion, and that has a shape surrounding the first fixed electrode side fixing portion and the second fixed electrode side fixing portion in a plan view; a first movable electrode side fixing portion and a second movable electrode side fixing portion that are disposed at the outside of the movable mass portion in a plan view; a first elastic portion connecting the first movable electrode side fixing portion and a portion of one end side of the movable mass portion in a first direction so as to allow the movable mass portion to be displaced in the first direction; and a second elastic portion connecting the second movable electrode side fixing portion and a portion of the other end side of the movable mass portion in the first direction so as to displace the movable mass portion in the first direction.