发明名称 |
X-RAY SMALL ANGLE OPTICAL SYSTEM |
摘要 |
Provided is an X-ray small angle optical system, which easily achieves a desired angular resolution, including: an X-ray source having a microfocus; a multilayer mirror having an elliptical reflection surface, and being configured to collect X-rays emitted from the X-ray source and to irradiate a sample; and an X-ray detector configured to detect scattered X-rays generated from the sample, in which the elliptical reflection surface of the multilayer mirror has a focal point A and a focal point B, in which the X-ray source is arranged such that the microfocus includes the focal point A, and in which the X-ray detector is arranged on the multilayer mirror side of the focal point B. |
申请公布号 |
US2017074809(A1) |
申请公布日期 |
2017.03.16 |
申请号 |
US201615259581 |
申请日期 |
2016.09.08 |
申请人 |
Rigaku Corporation |
发明人 |
ITO Kazuki;OMOTE Kazuhiko;Jiang Licai |
分类号 |
G01N23/201 |
主分类号 |
G01N23/201 |
代理机构 |
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代理人 |
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主权项 |
1. An X-ray small angle optical system, comprising:
an X-ray source having a microfocus; a multilayer mirror having an elliptical reflection surface, and being configured to collect X-rays emitted from the X-ray source and to irradiate a sample; and an X-ray detector configured to detect scattered X-rays generated from the sample, wherein the elliptical reflection surface of the multilayer mirror has a focal point A and a focal point B, wherein the X-ray source is arranged such that the microfocus includes the focal point A, and wherein the X-ray detector is arranged on the multilayer mirror side of the focal point B. |
地址 |
Tokyo JP |