| 摘要 |
PROBLEM TO BE SOLVED: To provide a temperature sensor which has high light transmittance and can be disposed in a transparent portion and the like.SOLUTION: A temperature sensor comprises: a transparent substrate 2; a thin film thermistor part 3 with pattern formation using a thermistor material on a surface of the transparent substrate; and a pair of electrodes 4 with pattern formation opposite each other on the thin film thermistor part. The electrodes are formed with transparent electrodes. The thin film thermistor part is made of a metal nitride represented by the general formula TiAlN(0.70≤y/(x+y)≤0.95, 0.4≤z≤0.5, and x+y+z=1), its crystal structure is a hexagonal wurtzite type single phase, and the a-axis is more strongly aligned in a direction vertical to a substrate surface than the c-axis is. |
