| 发明名称 |
PIEZOELECTRIC DRIVE DEVICE, ROBOT, AND METHOD FOR DRIVING PIEZOELECTRIC DRIVE DEVICE |
| 摘要 |
A piezoelectric drive device (10) includes a vibrating body (210), a support portion (220) formed integrally with the vibrating body (210), and a piezoelectric element (110) formed of a first electrode film (130), a piezoelectric body film (140), and a second electrode film (150) on at least one surface of the vibrating body (210). |
| 申请公布号 |
EP3121861(A3) |
申请公布日期 |
2017.03.15 |
| 申请号 |
EP20160177487 |
申请日期 |
2016.07.01 |
| 申请人 |
Seiko Epson Corporation |
发明人 |
Arakawa, Yutaka;Konishi, Akio;Hashimoto, Yasuharu;Miyazawa, Osamu;Iwazaki, Tomohisa;Tsuyuki, Yuichiro |
| 分类号 |
H01L41/09;H01L41/29;H01L41/318;H02N2/00;H02N2/10 |
主分类号 |
H01L41/09 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
