发明名称 |
ELECTRON DETECTOR INCLUDING AN INTIMATELY-COUPLED SCINTILLATOR-PHOTOMULTIPLIER COMBINATION, ELECTRON MICROSCOPE EMPLOYING THE SAME AND METHOD OF PRODUCING AN IMAGE |
摘要 |
A charged particle beam device includes an electron source structured to generate an electron beam, the electron source being coupled to an electron column that at least partially houses a system structured to direct the electron beam toward a specimen positioned in a sample chamber to which the electron column is coupled, and an electron detector. The electron detector includes one or more assemblies positioned within the electron column or the sample chamber, each of the assemblies including an SiPM and a scintillator directly connected face-to-face to an active light sensing surface of the SiPM without a light transporting device being positioned in between the scintillator and the SiPM. |
申请公布号 |
EP2599103(B1) |
申请公布日期 |
2017.03.15 |
申请号 |
EP20110813281 |
申请日期 |
2011.07.29 |
申请人 |
Pulsetor, LLC |
发明人 |
BARBI, Nicholas, C.;LOPOUR, Felip;PIEDMONTE, Claudio;MOTT, Richard, B. |
分类号 |
H01J37/28;G01T1/20;G01T1/24;H01J37/244 |
主分类号 |
H01J37/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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