发明名称 環境測定装置及び環境測定方法
摘要 An environment measuring device 1 has a measuring QCM sensor 10, a reference QCM sensor 20, a measurement oscillation circuit 15, a reference oscillation circuit 25, a frequency counter 31, s humidity sensor 51, a control unit 40, and a storage unit 41. The measuring QCM sensor 10 has an oscillator and an electrode formed by a corrosive metal on the surface of the oscillator, and the reference QCM sensor 20 has an oscillator and an electrode formed by a corrosion-resistant metal on the surface of the oscillator. The storage unit 41 stores the measurement count signal, the reference count signal, and the humidity signal which are associated with a measurement time. The control unit 40 determines an amount of increase in mass due to the corrosion of the electrode of the measuring QCM sensor by using the measurement count signal and the reference count signal.
申请公布号 JP6094673(B2) 申请公布日期 2017.03.15
申请号 JP20150518028 申请日期 2013.05.24
申请人 富士通株式会社 发明人 ▲高▼須 良三
分类号 G01N5/02 主分类号 G01N5/02
代理机构 代理人
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