| 摘要 |
The invention relates to a method for aligning a phase plate (6) inside an electron microscope (1), wherein the electron microscope (1) comprises an electron beam source (3) for generating an electron beam (5) and at least one lens (4) for focusing the electron beam (5), wherein by means of the phase plate (6) a defined phase shift is added to parts of the electron beam (5), comprising the following method steps: relative alignment of the phase plate (6) in relation to a focal plane (B) of the lens (4), lateral positioning of the phase plate (6) inside the focal plane (B), wherein at least one image is taken by means of an image recording unit and by means of an automated image analysis method a correction value (K) and/or a blur value is determined, modification of the lateral position of the phase plate (6) in dependence of the correction value (K) and/or modification of the alignment of the phase plate (8) in relation to the focal plane (B) in dependence of the blur value. |
