| 摘要 |
The present invention provides a filament exchange jig which does not require a space for the exchange of filaments and reduces the attachment and detachment number of an assistant vacuum container when exchanging the filaments. The filament exchange jig comprises: the assistant vacuum container (1); and a manipulation rod (21) for penetrating the assistant vacuum container, having the front end installed at a filament support structure (62) within the assistant vacuum container, and extracting filaments (61) from the assistant vacuum container within a vacuum chamber while the assistant vacuum container is evacuated. The assistant vacuum container includes: a container body (11) installed to be attached to or detached from the vacuum chamber and forming an installation hole (11a) through which the filaments extracted by the manipulation rod pass and a filament extraction hole (11b) through which the filaments pass when exchanging the filaments; and a lid body (12) for opening and closing opening or closing the filament extraction hole. |
