发明名称 無機結晶膜積層体の製造方法
摘要 PROBLEM TO BE SOLVED: To provide a method for producing an inorganic crystal film laminate having a release layer excellent in releasability.SOLUTION: There is provided a method for producing an inorganic crystal film laminate, the method comprising: a step of forming a release layer 12 composed of inorganic fine particles on a support 11; a step of forming an inorganic material film 13A in an amorphous state on the release layer 12; and a step of crystallizing the inorganic material film 13A in an amorphous state by heat treatment. The production method further comprises a step of transferring the inorganic crystal film onto a substrate.
申请公布号 JP6097647(B2) 申请公布日期 2017.03.15
申请号 JP20130134071 申请日期 2013.06.26
申请人 尾池工業株式会社;地方独立行政法人 大阪市立工業研究所 发明人 中西 康之;松川 公洋;渡辺 充
分类号 C01B25/32;C23C14/34 主分类号 C01B25/32
代理机构 代理人
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