发明名称 |
SYSTEM AND METHOD FOR FABRICATING PEROVSKITE FILM FOR SOLAR CELL APPLICATIONS |
摘要 |
A system and method for fabricating perovskite films for solar cell applications are provided, the system including a housing for use as a vacuum chamber, a substrate stage coupled to the top section of the housing; a first evaporator unit coupled to the bottom section of the housing and configured to generate BX2 (metal halide material) vapor; a second evaporator unit coupled to the housing and configured to generate AX (organic material) vapor; and a flow control unit coupled to the housing for controlling circulation of the AX vapor. The dimensions of the horizontal cross-sectional shape of the first evaporator unit, the dimensions of the horizontal cross-sectional shape of the substrate stage, and the relative position in the horizontal direction between the two horizontal cross-sectional shapes are configured to maximize the overlap between the two horizontal cross-sectional shapes. |
申请公布号 |
EP3140873(A1) |
申请公布日期 |
2017.03.15 |
申请号 |
EP20150789207 |
申请日期 |
2015.04.10 |
申请人 |
Okinawa Institute of Science and Technology School Corporation |
发明人 |
QI, Yabing;ONO, Luis Katsuya;WANG, Shenghao |
分类号 |
H01L51/44;C23C14/06;H01L51/48 |
主分类号 |
H01L51/44 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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