| 摘要 |
PROBLEM TO BE SOLVED: To provide a three-dimensional measuring system capable of achieving reduction in designing difficulty, reduction in cost, enlargement of a measurement range, throughput improvement, and high accuracy.SOLUTION: The three-dimensional measuring system includes a point light source for measurement which can be moved to an arbitrary position and a position detection device which receives light from the point light source for measurement and detects the position of the point light source for measurement. Optical systems 24A to 24C which condense the light from the point light source for measurement to line sensors 25A to 25C comprise rotationally-symmetrical lenses 61A to 61C and condensing optical components 62A to 62C which are arranged between the rotationally-symmetrical lenses and the respective line sensors and bend the point images of the rotationally-symmetrical lenses in directions orthogonal to the optical axes of the rotationally-symmetrical lenses and the pixel array directions of the line sensors, to guide the point images to the line sensors. |
