发明名称 半導体装置の作製方法、及び半導体装置
摘要 An object is to provide a field effect transistor (FET) having a conductor-semiconductor junction, which has excellent characteristics, which can be manufactured through an easy process, or which enables high integration. Owing to the junction between a semiconductor layer and a conductor having a work function lower than the electron affinity of the semiconductor layer, a region into which carriers are injected from the conductor is formed in the semiconductor layer. Such a region is used as an offset region of the FET or a resistor of a semiconductor circuit such as an inverter. Further, in the case of setting up such an offset region and a resistor in one semiconductor layer, an integrated semiconductor device can be manufactured.
申请公布号 JP6096233(B2) 申请公布日期 2017.03.15
申请号 JP20150056324 申请日期 2015.03.19
申请人 株式会社半導体エネルギー研究所 发明人 竹村 保彦
分类号 H01L29/786;H01L21/28;H01L21/822;H01L27/04;H01L29/417;H01L29/47;H01L29/872 主分类号 H01L29/786
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