发明名称 不揮発性メモリ素子及びその製造方法
摘要 A non-volatile memory device includes first and second vertical channel layers generally protruding upwardly from a semiconductor substrate substantially in parallel; a first gate group configured to include a plurality of memory cell gates which are stacked substantially along the first vertical channel layer and are isolated from each other with an interlayer insulating layer interposed substantially between the memory cell gates; a second gate group configured to include a plurality of memory cell gates which are stacked substantially along the second vertical channel layer and are isolated from each other with the interlayer insulating layer interposed substantially between the memory cell gates; a pipe channel layer configured to couple the first and the second vertical channel layers; and a channel layer extension part generally extended from the pipe channel layer to the semiconductor substrate and configured to couple the pipe channel layer and the semiconductor substrate.
申请公布号 JP6095908(B2) 申请公布日期 2017.03.15
申请号 JP20120149032 申请日期 2012.07.03
申请人 エスケーハイニックス株式会社SK hynix Inc. 发明人 劉 ▲ヒュン▼ 昇
分类号 H01L21/336;H01L27/115;H01L29/788;H01L29/792 主分类号 H01L21/336
代理机构 代理人
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