| 摘要 |
PROBLEM TO BE SOLVED: To provide an ion beam irradiator which can always cool a substrate to a very low temperature of -60°C through -100°C, for example, while cooling the substrate by using a refrigerant, without impairing the flexibility of resin piping for distributing the refrigerant, and can move the substrate freely during ion beam irradiation.SOLUTION: An ion beam irradiator includes a first cooling mechanism 5 including a heat exchange section 5A where heat exchange takes place between a substrate W and a refrigerant, and flexible resin piping 5B for distributing the refrigerant to the heat exchange section 5A, a second cooling mechanism 6 for cooling the substrate W by heat transfer, and a cooling mechanism control unit 7 for cooling the substrate W by the second cooling mechanism 6, while distributing the refrigerant having a temperature higher than a cold temperature limit to the resin piping 5B, at least when the target substrate cooling temperature of the substrate W is equal to or lower than the cold temperature limit of the resin piping 5B. |
