发明名称 半導体装置及びその製造方法
摘要 PROBLEM TO BE SOLVED: To inhibit formation of a level difference in a plated layer formed on wiring of a semiconductor device.SOLUTION: A semiconductor device comprises: a semiconductor substrate having a first surface; an electronic circuit which is located on the semiconductor substrate and has an electrode on the first surface; an insulation layer which is located on the first surface and has an opening on the electrode; a wiring layer which is located across from a first region on the insulation layer and to inside the opening and electrically connected to the electrode; a conductive layer located in a second region on the insulation layer along at least a part of an outer periphery of the wiring layer; and a first plated layer located on the wiring layer and a second plated layer located on the conductive layer.
申请公布号 JP6094290(B2) 申请公布日期 2017.03.15
申请号 JP20130056496 申请日期 2013.03.19
申请人 セイコーエプソン株式会社 发明人 ▲今▼西 貴之
分类号 H01L21/3205;H01L21/768;H01L23/522 主分类号 H01L21/3205
代理机构 代理人
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