| 摘要 |
An antioxidant gas blow-off unit comprises a plate-shaped hollow base portion with an antioxidant gas flow passage formed therein, a hole provided in the base portion so as to allow a capillary to be inserted thereinto or removed therefrom and configured to communicate with the antioxidant gas flow passage, and a plurality of electrodes embedded in a wall of the base portion in the vicinity of the hole and configured to generate plasma from an antioxidant gas. With the antioxidant gas blow-off unit, the bonding quality of a wire bonding apparatus can be improved. |
