发明名称 III−V族化合物半導体ナノワイヤ、電界効果トランジスタおよびスイッチ素子
摘要 The present invention pertains to a group III-V compound semiconductor nanowire able to be used in a group III-V compound semiconductor MOSFET (FET) operational at a small subthreshold (100 mV/dec or less). A side face of the group III-V compound semiconductor nanowire is a (-110) plane constituted of a very small (111) plane. The group III-V compound semiconductor nanowire has, e.g., a first layer having a (111)A plane as a side face thereof, and a second layer having a (111)B plane as a side face thereof. The first layer and the second layer are stacked alternatingly in the axial direction.
申请公布号 JP6095083(B2) 申请公布日期 2017.03.15
申请号 JP20150544804 申请日期 2014.10.29
申请人 国立大学法人北海道大学;国立研究開発法人科学技術振興機構 发明人 福井 孝志;冨岡 克広
分类号 H01L29/06;B82Y30/00;H01L21/336;H01L29/20;H01L29/66;H01L29/78 主分类号 H01L29/06
代理机构 代理人
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