发明名称 洗浄水の供給装置及び供給方法
摘要 PROBLEM TO BE SOLVED: To enhance cleaning quality by removing deposits on the work surface without damaging a work after the cutting work.SOLUTION: A water supply pipe 45 connected with a nozzle 41 is connected with a micro nano bubble generator 49 generating micro nano bubbles B in pure water, and the tip of the nozzle 41 is disposed in the vicinity of the cleaned part of a work W. A pressure maintenance valve 51 is provided at the outlet of the nozzle 41, and cleaning solution C containing micro nano bubbles B in pressurized supersaturation state generated from the micro nano bubble generator 49 is discharged from the nozzle 41 while cleaning, and supplied to the cleaned part of a work W from a close range.
申请公布号 JP6097008(B2) 申请公布日期 2017.03.15
申请号 JP20110260992 申请日期 2011.11.29
申请人 株式会社東京精密 发明人 横山 利幸
分类号 H01L21/304;B08B3/08 主分类号 H01L21/304
代理机构 代理人
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