| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of producing AlN whiskers which improves production efficiency of AlN whiskers by suppressing formation of granular AlN and reduces the possibility of inclusion of carbon in AlN whiskers to eliminate the need of a treatment for carbon removal.SOLUTION: A material based on Al-Ti-Si is arranged in an alumina boat 7; the material is heated to form a solution 9; and AlN whiskers 11 are grown in a nitrogen atmosphere. The formation of granular AlN can be suppressed by adjusting the composition of Al-Ti-Si, and AlN whiskers 11 can thus be grown preferentially. Since carbon black is not used as a raw material, the possibility of inclusion of carbon as an impurity in growing of AlN whiskers 11 can be reduced. |
