发明名称 多層配線基板及びこれを用いたプローブカード
摘要 A multilayer wiring base plate includes an insulating plate including a plurality of synthetic resin layers made of an insulating material, a wiring circuit provided in the insulating plate, a thin-film resistor formed along at least one of the synthetic resin layers to be buried in the synthetic resin layer and inserted in the wiring circuit, and a heat expansion and contraction restricting layer formed to be buried in the synthetic resin layer adjacent to the synthetic resin layer in which the thin-film resistor is formed to be buried, arranged along the thin-film resistor, and having a smaller linear expansion coefficient than a linear expansion coefficient of the adjacent synthetic resin layers.
申请公布号 JP6092572(B2) 申请公布日期 2017.03.08
申请号 JP20120238504 申请日期 2012.10.30
申请人 株式会社日本マイクロニクス 发明人 小田部 昇;大森 利則;菅井 孝安
分类号 G01R1/073;H01L21/66 主分类号 G01R1/073
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