发明名称 |
LASER PROCESSING DEVICE AND LASER PROCESSING METHOD |
摘要 |
A laser processing device 1 includes a laser light source 10, a spatial light modulator 20, a control section 22, and a condensing optical system 30. The spatial light modulator 20 is input with a laser light output from the laser light source 10, presents a hologram for modulating the phase of the laser light in each of a plurality of two-dimensionally arrayed pixels, and outputs the phase-modulated laser light. The control section 22 causes a part of the phase-modulated laser light (incident light) to be condensed at a condensing position existing in a processing region as a laser light (contribution light) having a constant energy not less than a predetermined threshold X. On the other hand, the control section 22 causes a laser light (unnecessary light) other than the contribution light condensed to the condensing position existing in the processing region to be dispersed and condensed at a condensing position existing in a non-processing region as a plurality of laser lights (non-contribution lights) having an energy less than the predetermined threshold X. |
申请公布号 |
EP3138654(A1) |
申请公布日期 |
2017.03.08 |
申请号 |
EP20160185966 |
申请日期 |
2009.08.24 |
申请人 |
HAMAMATSU PHOTONICS K.K. |
发明人 |
MATSUMOTO, Naoya;INOUE, Takashi;FUKUCHI, Norihiro;ITO, Haruyasu |
分类号 |
B23K26/00;B23K26/03;B23K26/06;B23K26/064;B23K26/067;B23K26/073;B41M5/26;G02F1/061 |
主分类号 |
B23K26/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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