发明名称 PROCESS FOR PRODUCING DIFFERENTLY DOPED SEMICONDUCTORS
摘要 The present invention relates to a liquid-phase method for doping a semiconductor substrate, characterized in that a first composition containing at least one first dopant is applied to one or more regions of the surface of the semiconductor substrate, in order to create one or more region(s) of the surface of the semiconductor substrate coated with the first composition; a second composition containing at least one second dopant is applied to one or more regions of the surface of the semiconductor substrate, in order to create one or more region(s) of the surface of the semiconductor substrate coated with the second composition, where the one or more region(s) coated with the first composition and the one or more region(s) coated with the second composition are different and do not overlap significantly and where the first dopant is an n-type dopant and the second dopant is a p-type dopant or vice versa; the regions of the surface of the semiconductor substrate coated with the first composition and with the second composition are each fully or partly activated; optionally, the unactivated regions of the surface of the semiconductor substrate coated with the first composition and with the second composition are each oxidized; and the semiconductor substrate is heated to a temperature at which the dopants diffuse out of the coating into the semiconductor substrate. The invention further relates to the semiconductor obtainable by the method and to the use thereof, especially in the production of solar cells.
申请公布号 EP3138119(A1) 申请公布日期 2017.03.08
申请号 EP20150715773 申请日期 2015.04.17
申请人 Evonik Degussa GmbH 发明人 MADER, Christoph;GÜNTHER, Christian;ERZ, Joachim;MARTENS, Susanne;LEHMKUHL, Jasmin;TRAUT, Stephan;WUNNICKE, Odo
分类号 H01L21/228;H01L21/22;H01L31/18 主分类号 H01L21/228
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